Description
Description
The Keysight 5517C is used primarily in VME and PC based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications. Option 009 allows a larger angular range of measurement by providing a 9 mm beam diameter for use with three-axis interferometers. Please contact Keysight for custom requirements.
Key Features & Specifications
General
- Maximum velocity with linear optics: 711 mm/s
- Reference frequency: 2.4 to 3.0 MHz
- Weight: 3.4 kg (7.5 lb)
- Warm up time: 90 minutes
Laser Beam
- Diameter: 6 mm ; option 003: 3mm & option 009: 9 mm available
- Minimum output power: 180 µW ; option H03: 300 µW, option H05: 240 µW & option H07: 400 µW available
- Maximum output power: 1 mW
- Beam height: 79.5 ± 1.0 mm
Input Power Requirement
- +15 V ± 0.3 V at 3.0 A maximum
- -15 V ± 0.3 V at 0.3 A maximum
NIST-Traceable Calibrations
Standard Calibration Price (without data): Request a Quote
ANSI Z540 Calibration Price (with as-found & as-left data): Request a Quote
ISO/IEC 17025:2005 Accredited Calibration Price (with data & uncertainties): Request a Quote
ANSI Z540.3 with data & uncertainties and Guardbanding: Request a Quote
Test & Measurement Equipment Repair Services: Request a Quote
